Method and apparatus for determining optimum size of LSI chip

摘要

An apparatus for determining the optimum size of a LSI chip of the present invention has the-theoretical-number-of-chips calculating means 5 calculating the theoretical number of chips according to a chip configuration in a mask calculated by in-the-mask-chip-configuration calculating means 3 and the information of wafer-line information holding part 4; the-number-of-transcriptions calculating means 6 calculating the number of transcriptions of a layout pattern on the mask to a wafer according to the chip configuration in the mask calculated by in-the-mask-chip configuration calculating means 3 and the theoretical number of chips calculated by the-theoretical-number-of-chips calculating means 5; and display part 9 that displays the calculated theoretical number of chips and number of transcriptions.