发明名称 Optical measuring device
摘要 The present invention relates to an optical measuring device (1) for measuring the shape of particularly rough surfaces of a test object (O), the measuring device including a device that has at least one light source (LQ), one illumination optics, one measuring optics, and at least one detection unit, for determining the intensity distribution of a measuring beam reflected from the surface as a function of a focus position relative to the object surface. A simple measurement even of highly inaccessible locations on the test object is made possible by the fact that the measuring optics has an optical probe for generating at least one intermediate image (ZW) of the observed surface area (FIG. 1).
申请公布号 US2003002054(A1) 申请公布日期 2003.01.02
申请号 US20020145523 申请日期 2002.05.14
申请人 PRINZHAUSEN FRIEDRICH;LINDNER MICHAEL 发明人 PRINZHAUSEN FRIEDRICH;LINDNER MICHAEL
分类号 G02B21/00;(IPC1-7):G01B11/24 主分类号 G02B21/00
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