发明名称 WIRING BOARD, SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING WIRING BOARD
摘要 A wiring substrate (1) comprises an insulating base (10) with connection holes (11), buried conductors (12) provided in the connection holes (11) without reaching a rear surface of the insulating base (10), and wiring layers 14 connected to the buried conductors (12). The buried conductors (12) thicken the wiring layers (14), and can form aligning parts (110) on the rear surface of the connection holes (11) to be used for three-dimensional mounting structure. Each wiring layer (14) includes thin terminals (14A), wirings (14B) and thick electrodes (14C). Not only the terminals (14A) and wirings (14B) but also the buried conductors (12) are raised by the same manufacturing process. A semiconductor element (2) is attached to the electrodes (14C) of the wiring substrate (1). <IMAGE>
申请公布号 EP1271644(A1) 申请公布日期 2003.01.02
申请号 EP20010906171 申请日期 2001.02.21
申请人 HITACHI CHEMICAL COMPANY, LTD. 发明人 NAKAMURA, HI.;ENOMOTO, T.;YAMAZAKI, TOSHIO;KAWAZOE, HIROSHI
分类号 H01L23/12;H05K1/18;H01L21/48;H01L21/68;H01L23/31;H01L23/498;H01L25/065;H01L25/07;H01L25/18;H05K3/06;H05K3/20;H05K3/40 主分类号 H01L23/12
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