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经营范围
发明名称
Apparat zum Scheibenätzen
摘要
申请公布号
DE69624889(D1)
申请公布日期
2003.01.02
申请号
DE19966024889
申请日期
1996.08.30
申请人
SHIN-ETSU HANDOTAI CO., LTD.
发明人
ABE, TATSUO;SUZUKI, MAKOTO
分类号
C23F1/08;H01L21/00;H01L21/304;H01L21/306;(IPC1-7):H01L21/00
主分类号
C23F1/08
代理机构
代理人
主权项
地址
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