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发明名称
METHOD AND DEVICE FOR MAKING SUBSTRATES
摘要
申请公布号
EP1268884(A1)
申请公布日期
2003.01.02
申请号
EP20010919609
申请日期
2001.04.02
申请人
S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES
发明人
IWASAKI, ATSUSHI;GHYSELEN, BRUNO
分类号
C30B29/06;C30B31/22;C30B33/00;H01L21/762;(IPC1-7):C30B31/22
主分类号
C30B29/06
代理机构
代理人
主权项
地址
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