| 摘要 |
PURPOSE: A laser-repair equipment used in an EDS(Electrical Die Sorting) is provided to prevent scratches and the breakage of a wafer by immediately sensing the alignment of the wafer. CONSTITUTION: The laser-repair equipment(100) comprises a cassette(110), a sensor(130), and a reflection plate(140). The sensor(130) is formed on the upper of the cassette(110) for sensing the alignment of a wafer(120). If the wafer(120) is normally aligned, the laser beam(150) is totally reflected from the reflection plate(140). The sensor(130) further includes a light emitting part, a light receiving part and a display part for displaying the sensing state. An LED(Light Emission Diode) is used as the display part.
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