| 摘要 |
PURPOSE: A method for manufacturing micro device is provided, in which alignment and bonding processes are eliminated, to thereby reduce power consumption and manufacturing cost. CONSTITUTION: A method for manufacturing micro device, comprises a first step of forming a channel layer onto a substrate; a second step of sequentially forming a cover layer(12) and an energy supply unit(18) onto the channel layer; a third step of forming a fluid inlet port and a fluid outlet port(17) by selectively removing the cover layer or the lower portion of the substrate in such a manner that the channel layer is partially exposed; and a fourth step of forming a fluid flow portion by selectively removing the channel layer through the fluid inlet port or the fluid outlet port. The substrate is formed into multiple layers including a silicon layer, oxide layer or a nitride layer.
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