STEPPER FOR MANUFACTURING SEMICONDUCTOR DEVICE

摘要

PURPOSE: A stepper for manufacturing semiconductors is provided to reduce a loading time and a generation of error when loading a reticle by forming a PPD box on an upper part of a reticle box. CONSTITUTION: The stepper comprises a reticle box(10), a reticle loader(12) for loading a reticle, a PPD box(14), and a bar code leader(18). The PPD box(14) is located on the upper part of the reticle box(10) for inspecting particles of the reticle loaded by the reticle loader(12). The bar code leader(18) is fixed to a fork(16) of the reticle loader(12) for checking bar code of the reticle loaded by the reticle loader(12).