发明名称 |
Method and apparatus for forming a layer on a substrate |
摘要 |
A method and an apparatus for forming a layer on a substrate are disclosed. In accordance with one embodiment, a substrate (901) is placed into a chamber (30) that includes a coil (16) and a shield (14) wherein the coil and the shield are electrically isolated by an isolation/support member (32) having a first surface (321) that is substantially contiguous with a surface of the coil and having a second surface (322) that is substantially contiguous with a surface of the shield. A layer (1002, 1102) is then deposited onto the substrate (901).
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申请公布号 |
US6500315(B1) |
申请公布日期 |
2002.12.31 |
申请号 |
US20000631400 |
申请日期 |
2000.08.03 |
申请人 |
MOTOROLA, INC. |
发明人 |
ARUNACHALAM VALLI;VENTZEK PETER L. G.;DENNING DEAN J.;ARNOLD JOHN C. |
分类号 |
C23C14/35;H01J37/32;H01L21/316;(IPC1-7):C23C16/00;C23C14/34;H01L21/44 |
主分类号 |
C23C14/35 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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