摘要 |
A semiconductor element wherein only one of two mutually adjacent electrodes has a split pattern that is formed on the same layer as the other electrode. The split electrode is connected to a wiring layer provided on a separate layer. When the semiconductor element is a MOSFET, the mutually adjacent electrodes are provided on a source diffusion layer and a drain diffusion layer. Specifically, they serve as a source electrode and a drain electrode, respectively. The split electrode is connected to the source diffusion layer or drain diffusion layer through a single contact hole. This allows the parasitic capacitance in the semiconductor element region to be easily reduced even when the semiconductor element, such as a MOSFET, which comprises the semiconductor integrated circuit is miniaturized.
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