发明名称 Semiconductor device
摘要 In a semiconductor device, a first conductive layer (2) is located on a semiconductor substrate (14) through an insulating film (13a) and beneath a first insulating layer (13f). On the first insulating layer (13f) is formed a second conductive layer (8) followed by a second insulating layer (13g), either or both of which are very thin. A third conductive layer (6) is placed on the second insulating layer (13g). A connecting column (16) extends from the third conducting layer (6) through and forming an end contact with the second conductive layer (8) to the first conducting layer (2) and the substrate (14), with a greater portion of the column resting upon the substrate (14). The third conductive layer (6) forms the gate electrode (6b) of a top gate type TFT.
申请公布号 US6501178(B1) 申请公布日期 2002.12.31
申请号 US19970795176 申请日期 1997.02.04
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 KURIYAMA HIROTADA;TSUTSUMI KAZUHITO
分类号 H01L21/768;H01L21/8244;H01L23/522;H01L27/11;H01L29/786;(IPC1-7):H01L23/48;H01L23/52;H01L29/40 主分类号 H01L21/768
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