Apparatus for rotary cathode electroplating with wireless power transfer

摘要

An apparatus for rotary cathode electroplating having a head assembly, a substrate/thief assembly having a thieving ring which includes a number of individually chargeable segments, and a secondary induction assembly including a secondary core and a secondary winding. A motor drives the substrate/thief assembly to rotate relative to the head assembly. A controller directs electrical charge to each of the individually chargeable segments of the thieving ring. An electrical storage device stores electrical energy which is to be supplied to the controller. A charging apparatus induces a magnetic flux which induces an alternating current in the secondary winding of the secondary induction assembly. A converter converts the induced alternating current to direct current, which is then stored on the electrical storage device.