Circuit configuration for measuring the capacitance of structures in an integrated circuit

摘要

A circuit configuration for measuring the capacitance of structures in an integrated circuit having a test structure and a reference structure, includes first and second series circuits, each having two transistors connected in series and connected in parallel between supply terminals each providing one supply potential. The test structure is connected to a coupling node of the transistors of the first series circuit. The reference structure is connected to a coupling node of the transistors of the second series circuit. The supply terminals of the series circuits are connected to a controllable voltage source. A voltage-dependent differential capacitance measurement can be carried out on the test structure by using the circuit configuration.