发明名称 Inductor recognition method, layout inspection method, computer readable recording medium in which a layout inspection program is recorded and process for a semiconductor device
摘要 An inductor recognition method for recognizing an inductor, a layout inspection method wherein it is possible to automatically carry out a verification of a design standard, in the inductor and a process for a semiconductor device using this layout inspection method are provided. The inductor recognition method includes the step of arranging an inductor position representation mark so as to surround a design pattern of an interconnection part, which works as an inductor and has a starting point and a finishing point; the step of arranging a starting point position representation mark and a finishing point position representation mark so as to surround, respectively, regions corresponding to the starting point and the finishing point; and the step of recognizing information with respect to an inductor by means of the inductor position representation mark, the starting point position representation mark and the finishing point position representation mark.
申请公布号 US6500722(B2) 申请公布日期 2002.12.31
申请号 US20010951427 申请日期 2001.09.14
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA;MITSUBISHI ELECTRIC ENGINEERING COMPANY LIMITED 发明人 WADA YOSHIKI;KOMURASAKI HIROSHI;MAEDA SHIGENOBU;YOSHIDA SHUJI
分类号 G06F17/50;H01L21/82;H01L21/822;H01L23/522;H01L23/544;H01L27/04;(IPC1-7):H01L21/20 主分类号 G06F17/50
代理机构 代理人
主权项
地址