| 摘要 |
PURPOSE: A slurry mixing feeder and slurry mixing and feeding method are provided to adequately feed to a chemical mechanical polishing machine a slurry at a desired flow rate suited for intended processing, at a high-accuracy mixing ratio and in a good form free of deteriorations. CONSTITUTION: A slurry mixing feeder comprises suction ports for sucking the liquids, respectively, a number of the suction ports corresponding to that of the liquids, a discharge port for feeding the slurry to the chemical mechanical polishing machine, feed pumps(5) arranged in feed lines for the respective liquids, the feed lines extending from the individual suction ports to the discharge port, for sucking the individual liquids in specific amounts to give the mixing ratio and delivering the thus-sucked liquids toward the discharge port, and dampers(6) and pressure-regulated restrictors arranged in combination in the feed lines on delivery sides of the feed pumps, respectively.
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