发明名称 Method of forming fluorine-bearing diamond layer on substrates, including tool substrates
摘要 A method of forming a fluorine-bearing diamond layer on non-diamond substrates, especially on tool substrates comprising a metal matrix and hard particles, such as tungsten carbide particles, in the metal matrix. The substrate and a fluorine-bearing plasma or other gas are then contacted under temperature and pressure conditions effective to nucleate fluorine-bearing diamond on the substrate. A tool insert substrate is treated prior to the diamond nucleation and growth operation by etching both the metal matrix and the hard particles using suitable etchants.
申请公布号 US6500488(B1) 申请公布日期 2002.12.31
申请号 US19920924901 申请日期 1992.08.04
申请人 NORTHWESTERN UNIV. 发明人 CHANG R. P. H.;GRANNEN KEVIN J.
分类号 C23C16/27;(IPC1-7):C23C16/26;B05D3/10 主分类号 C23C16/27
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