发明名称 |
Method of forming fluorine-bearing diamond layer on substrates, including tool substrates |
摘要 |
A method of forming a fluorine-bearing diamond layer on non-diamond substrates, especially on tool substrates comprising a metal matrix and hard particles, such as tungsten carbide particles, in the metal matrix. The substrate and a fluorine-bearing plasma or other gas are then contacted under temperature and pressure conditions effective to nucleate fluorine-bearing diamond on the substrate. A tool insert substrate is treated prior to the diamond nucleation and growth operation by etching both the metal matrix and the hard particles using suitable etchants.
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申请公布号 |
US6500488(B1) |
申请公布日期 |
2002.12.31 |
申请号 |
US19920924901 |
申请日期 |
1992.08.04 |
申请人 |
NORTHWESTERN UNIV. |
发明人 |
CHANG R. P. H.;GRANNEN KEVIN J. |
分类号 |
C23C16/27;(IPC1-7):C23C16/26;B05D3/10 |
主分类号 |
C23C16/27 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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