APPARATUS FOR DRIVING STAGE OF LOAD LOCK CHAMBER

摘要

PURPOSE: An apparatus for driving a stage of a load lock chamber is provided to load or unload stably a cassette on a load lock chamber by improving a structure of a driving apparatus. CONSTITUTION: A stage of a load lock chamber(200) is driven by a motor. The motor is fixed to load lock chamber(200) by a motor fixing member(220). The motor is connected with a shaft(214) by a connection pin. The shaft(214) is connected with the first gear(216). The first gear(216) is connected with a connection portion(218). The connection portion(218) can be formed with a chain or a belt. A pivot shaft is connected a connection bar. The second gear(222) is formed at one end portion of the connection bar. The second gear(222) is connected with the connection portion(218). A sensor bar(224) is adhered at the shaft(214) between the motor and the first gear(216). A sensor portion is installed at the motor fixing member(220).