| 摘要 |
The gate electrode of a crystalline TFT is constructed as a clad structure which consists of a first gate electrode, a second gate electrode and a third gate electrode, thereby to enhance the thermal resistance of the gate electrode. Besides, an n-channel TFT is provided with a low-concentration impurity region which adjoins a channel forming region, and which includes a subregion overlapped by the gate electrode and a subregion not overlapped by the gate electrode, thereby to mitigate a high electric field near the drain of the TFT and to simultaneously prevent the OFF current of the TFT from increasing.
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