METHOD FOR COATING SUBJECTS BY PARYLENE

摘要

PURPOSE: Provided is a method for coating subjects by parylene which executes a pre-treatment process before coating by parylene to induce coating in a molecule state so that it helps to form a parylene coating layer in an elaborate and uniform way. CONSTITUTION: The method for coating the subjects by parylene, which is generic terms used in unsubstituted or substituted poly-para-xylene, is characterized by comprising the steps of: (i) eliminating extraneous matters from the surface of the subjects to be coated and spraying solid carbon dioxide to the surface of the subjects to pre-treat; and (ii) depositing parylene on the surface of the pre-treated subjects to form a coating layer.