METHOD FOR COATING SUBSTRATE BY PARYLENE

摘要

PURPOSE: Provided is a method for coating a substrate by parylene which executes simple pre-treatment process before coating by parylene to induce coating in a molecule state so that it helps to form a parylene coating layer in an elaborate and uniform way. CONSTITUTION: The method for coating the substrate by parylene, which is generic terms used in unsubstituted or substituted poly-para-xylene, is characterized by comprising the steps of: (i) cooling the surface of the substrate to be coated under -10deg.C and pre-treating to coat; and (ii) depositing parylene on the surface of the pre-treated substrate to form a coating layer.