APPARATUS FOR SUPPLYING SLURRY

摘要

PURPOSE: An apparatus for supplying slurry is provided to supply the gas stored in a pressure supplying unit to a flow control unit functioning to switch on/off a mixed exhausting pipe, a motor pump and a branch path, by installing the flow control unit in the mixed exhausting pipe between a mixed tank and the motor pump. CONSTITUTION: The mixed tank receives deionized water and slurry stored in a cylinder through the mixed exhausting pipe and generates mixed slurry. The motor pump takes out the mixed slurry stored in the mixed tank and transfers the mixed slurry to the outside through a supply pipe. The flow control unit functions to switch on/off the mixed exhausting pipe, the motor pump and the branch path, installed in the mixed exhausting pipe between the mixed tank and the motor pump. The pressure supplying unit supplies gas to the flow control unit and exhausts the deionized water and slurry remaining in the mixed exhausting pipe and the supply pipe by using a pressure difference between the inside and the outside of the pressure supplying unit.