发明名称 |
COUPLED MICROMACHINED STRUCTURE |
摘要 |
<p>A suspended, coupled micromachined structure including two proof masses and multiple support arms configured to suspend the masses above a substrate and a coupling spring element having two ends. Each end of the coupling spring element may be attached to a proof mass at a point between the proof masses. The frequency response characteristics of the proof masses may be improved.</p> |
申请公布号 |
WO02103289(A1) |
申请公布日期 |
2002.12.27 |
申请号 |
WO2002US19293 |
申请日期 |
2002.06.19 |
申请人 |
HONEYWELL INTERNATIONAL INC. |
发明人 |
KNOWLES, GARY, R.;WEBER, MARK, W. |
分类号 |
B81B3/00;G01C19/5719;(IPC1-7):G01C19/56;G01P3/14 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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