SUBSTRATE TABLE,PRODUCTION METHOD THEREFOR AND PLASMA TREATING DEVICE

摘要

The susceptor(10)of a plasma treating device,or the electrostatic chuck(12)of a substrate table is formed by ceramic spraying.A ceramic spay layer(12A)is pore−sealed by methacrylic resin(12D).Resin raw material mainly containing methyl methacrylate is applied to and impregnated into the ceramic spray layer and then is cured to thereby fill pores between ceramic particles in the ceramic spray layer with methcrylic resin.Methacrylic resin raw material solution,which does not produce pores at curing,can complete perfect pore−sealing.