| 摘要 |
<p>A diaphragm which is made from an alloy composition having a Young's modulus of 40 GPa to 90 GPa. The diaphragm allows the manufacture of a diaphragm valve exhibiting a widened range of control with respect to a flow rate of a fluid. The diaphragm has been found as a result of an investigation on the material of a diaphragm which has been little studied.</p> |
