MEMS SENSOR WITH SINGLE CENTRAL ANCHOR AND MOTION-LIMITING CONNECTION GEOMETRY

摘要

A MEMS sensor (10) which includes a sense element (30) and a single anchor (28) that supports sense element (30) at a central aperture of sense plate (30), wherein anchor (28) uses connection elements or flexures (27) having a geometry that limits the motion of sense element (30) to a single degree-of-freedom, in order to reduce thermal stress.