发明名称 SUBSTRATE FOR ACTIVE MATRIX DISPLAY DEVICE, LIQUID-CRYSTAL DISPLAY DEVICE COMPRISING IT, AND MANUFACTURING METHOD THEREFOR
摘要 <p>PROBLEM TO BE SOLVED: To provide a substrate for an active matrix display device integral with a peripheral circuit, comprising a thin-film transistor which uses a polycrystal silicon thin-film and provides excellent TFT characteristics and display quality, and to provide a liquid-crystal display device comprising it and a manufacturing method therefor. SOLUTION: There are provided a display region in which a plurality of pixel regions formed of a plurality of bus lines are arrayed in matrix, a peripheral circuit formation region arranged around the display region, a thin-film transistor 27 which is formed on a glass substrate 2 and comprises a channel region formed of a (100) preference orientation polycrystal silicon thin-film 9, and a thin-film transistor 26 which is formed on the glass substrate 2 and comprises a channel region formed of a (111) preference orientation polycrystal silicon thin film 8.</p>
申请公布号 JP2002373990(A) 申请公布日期 2002.12.26
申请号 JP20010180183 申请日期 2001.06.14
申请人 FUJITSU LTD 发明人 SENDA MITSURU
分类号 G02F1/1368;H01L21/20;H01L21/336;H01L27/08;H01L29/786;(IPC1-7):H01L29/786;G02F1/136 主分类号 G02F1/1368
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