| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a mounting structure for a current feed terminal connection to a current feed terminal part of a resistance heating element favorable for the stable operation of a ceramic heater to be maintained for a long period of time. SOLUTION: The connecting structure of the current feed terminal 5 of the ceramic heater is configured so that the resistance heating element 2 is installed on that surface of a ceramic substrate 1 located on the surface opposite the heating side for a workpiece W, wherein the current feed terminal part of the resistance heating element 2 formed on the surface of the substrate 1 is arranged rigidly as a terminal pin 5 provided upright on the plate surface, and an external terminal 6 is connected to the terminal pin 5.</p> |
