发明名称 METHOD FOR MANUFACTURING STAMPER FOR OPTICAL RECORDING MEDIUM
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a stamper for an optical recording medium, by which the rectangular property of an uneven pattern which is to be formed on a substrate of the optical recording medium can be enhanced. SOLUTION: This method for manufacturing the stamper comprises a step of making the surface of a positive photoresist layer insolubilize, on which a latent image having the prescribed pattern is formed by exposing it to a laser beam, by treating it with a low-concentration alkaline developer and a step to furthermore develop the latent image by using the alkaline developer to form the prescribed pattern.
申请公布号 JP2002373456(A) 申请公布日期 2002.12.26
申请号 JP20010180093 申请日期 2001.06.14
申请人 TOSOH CORP 发明人 TANAKA TAKESHI;KOGO MASANORI
分类号 G11B7/26;(IPC1-7):G11B7/26 主分类号 G11B7/26
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