发明名称 Non-c-axis oriented bismuth-layered perovskite ferroelectric structure epitaxially grown on buffered silicon
摘要 A structure containing a ferroelectric material comprises a substrate comprising silicon, a buffer layer formed on the substrate, and a non-c-axis-oriented, electrically-conductive template layer formed on the buffer layer. The template layer comprises a perovskite oxide compound. A non-c-axis-oriented, anisotropic perovskite ferroelectric layer is formed on the template layer.
申请公布号 US2002197489(A1) 申请公布日期 2002.12.26
申请号 US20010875630 申请日期 2001.06.06
申请人 LEE HO NYUNG;SENZ STEPHAN;VISINOIU ALINA;PIGNOLET ALAIN;HESSE DIETRICH;GOSELE ULRICH 发明人 LEE HO NYUNG;SENZ STEPHAN;VISINOIU ALINA;PIGNOLET ALAIN;HESSE DIETRICH;GOSELE ULRICH
分类号 B32B9/00;B32B9/04;B32B13/04;B32B15/04;B32B19/00;C30B23/02;C30B25/18;C30B29/32;H01L21/314;H01L21/316;(IPC1-7):B32B9/00 主分类号 B32B9/00
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