| 摘要 |
PROBLEM TO BE SOLVED: To actualize high throughput by scanning and irradiating an object surface with high precision even when exposure is carried out during the acceleration or deceleration of movable stages. SOLUTION: An illuminance distribution varying means is used for a scanning aligner carrying out exposure even when the movable stages 31 and 35 are accelerated or decelerated, and includes a rotatable wedgelike prism 21 and a prism driving part 101 driving the prism 21 as an optical member for varying the illuminance distribution with time. The means has a function of varying the time variation of the illuminance distribution corresponding to a driving pattern, and the illuminance pattern corresponding to the acceleration/ deceleration patterns of the stages 31 and 35 is measured. According to the measurement result, the driving pattern of the wedgelike prism 21 is determined.
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