摘要 |
A test carrier for testing bumped semiconductor components such dice, chip scale packages, BGA devices, and wafers is provided. The test carrier includes a base for retaining one or more components and contact members for making temporary electrical connections with contact balls on the components (e.g., solder balls). The test carrier also includes terminal contacts formed as hard metal balls, as hard metal balls coated with a non-oxidizing metal layer, or as glass, ceramic or plastic members coated with a conductive material. The contact members on the base protect the contact balls on the components from deformation during testing and handling. The terminal contacts on the test carrier are configured for multiple uses in a production environment without deformation. Also provided is a calibration carrier for calibrating semiconductor test systems for bumped components, and a cleaning carrier for cleaning test sockets for bumped components. The calibration carrier can include on board evaluation circuitry for evaluating electrical characteristics of a test system, such as contact resistances between electrical connectors of a test socket and terminal contacts on the calibration carrier. The cleaning carrier includes terminal contacts formed of a solder wettable material configured to attract solder contaminants in test sockets.
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