| 摘要 |
PROBLEM TO BE SOLVED: To provide a galvanomirror by which vibration in a direction perpendicular to a direction in which a supporting member to turnably support a mirror around two shafts is extended is reduced. SOLUTION: A spring to freely rotatably support a mirror holder 18 to which the mirror is attached around rotary shafts 8 and 9 consists of a first deformed part 23a and a second deformed part 23b provided at end parts and a connecting part 23c to connect them, and a thin plate is formed in parallel with a plane including the rotary shafts 8 and 9 by etching, and since rigidity in a Z-direction perpendicular to the plane specially at the connecting part is deteriorated as it is, an outer peripheral part 23c-2 whose rigidity in the Z-direction is enhanced by plastic-molding is provided at the connecting part 23c, so that unnecessary vibration is suppressed. |
