发明名称 SCANNING TYPE EXPOSURE DEVICE
摘要 PROBLEM TO BE SOLVED: To eliminate problems that high speed scanning with laser beams can not be repeated and also the influence of the intensity drift of a laser and the influence of local heating caused by low speed irradiation can not be minimized. SOLUTION: This device is provided with a laser beam source 1 to emit the laser beams, a deflecting means 2 to deflect and emit the laser beams emitted by the laser beam source 1 by a specified deflection angle, a deflection angle compensating means 3 to emit the laser beams emitted by the deflecting means 2 by compensating the deflection angle, a signal storing means 4, a signal generating means 5 and a driving means 6 to perform scanning with the laser beams emitted by the deflection angle compensating means 3 by controlling the deflection angle and a phase mask 7 to irradiate an optical fiber 8 installed on a lower face in a scanning direction with the laser beams through the transmission type diffraction grating of a phase modulating type.
申请公布号 JP2002372682(A) 申请公布日期 2002.12.26
申请号 JP20010182200 申请日期 2001.06.15
申请人 MITSUBISHI ELECTRIC CORP 发明人 ANDO TOSHIYUKI;HIRANO YOSHIHITO;KASE TAKAAKI;HASHIMOTO MINORU
分类号 G02B26/10;G02B5/18;(IPC1-7):G02B26/10 主分类号 G02B26/10
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