| 摘要 |
PROBLEM TO BE SOLVED: To avoid leakage of gas in a pressure reducing chamber outside of a pressure reducer even when a plate shaped diaphragm is damaged and detect when a pressure regulation value in the pressure reducing chamber abnormally lowers in a pressure reducer for regulating a pressure of the gas in the pressure reducing chamber by partitioning the pressure reducing chamber and an atmosphere chamber with the plate shaped diaphragm. SOLUTION: This pressure reducer is equipped with the plate shaped diaphragm 16 for partitioning the pressure reducing chamber 14 and the atmosphere chamber 17, a pressure regulating spring 21 for energizing the plate shaped diaphragm 16 to the pressure reducing chamber 14 side, and a pressure regulating valve 10 provided on the plate shaped diaphragm 16 and opening and closing a gas passage 13 to the pressure reducing chamber 14 by movement of the plate shaped diaphragm 16. A wave shaped or bellowphragm shaped diaphragm 30 is provided on the plate shaped diaphragm 16 on the atmosphere chamber 17 side so at to seal the plate shaped diaphragm 16 and the atmosphere chamber 14 there between. An available area of the wave shaped or bellowphragm shaped diaphragm 30 is made to be larger than an available area of the plate shaped diaphragm 16. Further, a pressure sensor 31 is provided for detecting the pressure of the gas in the pressure reducing chamber.
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