发明名称 SOLAR BATTERY CELL AND MANUFACTURING METHOD THEREFOR
摘要 <p>PROBLEM TO BE SOLVED: To provide a solar battery cell together with its manufacturing method, wherein a relatively minute electrode is easily formed on a solar light receiving surface in a simple process. SOLUTION: Each of a plurality of comb-like electrodes 30 provided on a solar light receiving surface 28 comprises an electroless plating conductive layer 39 which is directly fitted to the solar light receiving surface 28 of a semiconductor body in an electroless plating process P7. So, the electroless plating conductive layer 39 is selectively formed only by touching electroless plating liquid. Compared to a conventional process in which a metal vapor- deposition layer is formed before forming a plating conductive layer 40, the expensive manufacturing facility for metal vapor deposition in a vacuum chamber and a relatively large space therefor are not required, resulting in a relatively simple process, while the decrease in the number of processes lowers a manufacturing cost. The mask alignment for forming an electrode is not required. Such a inconvenience as increase in the number of process or decrease in yield caused by variation in the alignment is settled.</p>
申请公布号 JP2002373996(A) 申请公布日期 2002.12.26
申请号 JP20010300425 申请日期 2001.09.28
申请人 DAIDO STEEL CO LTD;TOYOTA GAKUEN 发明人 ARAKI KENJI;UOZUMI HISAFUMI;YAMAGUCHI MASASHI
分类号 C23C18/31;H01L21/288;H01L21/322;H01L31/04;H01L31/042;(IPC1-7):H01L31/04 主分类号 C23C18/31
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