摘要 |
<p>PROBLEM TO BE SOLVED: To make distances between a draw out electrode and a negative electrode uniform, and obtain an electron source having a uniform electron emission by suppressing unevennesses and projection on the negative electrode surface. SOLUTION: A carbonaceous material on a substrate is formed in a pattern of the negative electrode shape, and afterwards, the unevennesses and projections of the formed carbonaceous material are crushed by a push treatment of a roll and a press treatment. Because surface roughness of the carbonaceous material becomes smaller, the distances between the drawing out electrode and the negative electrode become constant, and the uniform and stable electron emission becomes possible.</p> |