发明名称 |
Surface acoustic wave device and method of producing the same |
摘要 |
A surface acoustic wave device includes a piezoelectric substrate and at least one interdigital electrode disposed on the piezoelectric substrate. The interdigital electrode is made of alpha-tantalum.
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申请公布号 |
US2002195905(A1) |
申请公布日期 |
2002.12.26 |
申请号 |
US20020207082 |
申请日期 |
2002.07.30 |
申请人 |
MURATA MANUFACTURING CO., LTD. |
发明人 |
KOBAYASHI MASATO;NAKAGAWA MASATOSHI;TOSE MAKOTO;HAGI TOSHIO;YONEDA TOSHIMARO |
分类号 |
H03H3/08;(IPC1-7):H01L41/047 |
主分类号 |
H03H3/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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