| 摘要 |
A communication monitoring system is comprised of a semiconductor device manufacturing apparatus connected with a network, a host computer connected with the network, and a monitoring unit connected with the network. The semiconductor device manufacturing apparatus and the host computer carry out a sequence of communications through the network about a process of the semiconductor device manufacturing apparatus. The monitoring unit takes therein a first set of packets of the first sequence of communications and a second set of packets of the second sequence of communications through the network between the semiconductor device manufacturing apparatus and the host computer, and determines whether the communication between of the semiconductor device manufacturing apparatus and the host computer is normal or defective, based on the packets of the first and second sets.
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