发明名称 |
Catadioptric objective |
摘要 |
A catadioptric objective is provided with a beam splitter surrounded at least partially by a mount, with a mirror, with a plurality of lenses and with a lambd/4 plate arranged between the mirror and the beam splitter. Arranged between the beam splitter and the mount on the side on which false light emerges from the beam splitter is an absorption device that absorbs false light traversing the beam splitter
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申请公布号 |
US2002196550(A1) |
申请公布日期 |
2002.12.26 |
申请号 |
US20020117943 |
申请日期 |
2002.04.08 |
申请人 |
GERHARD MICHAEL;PAUL HANS-JOCHEN |
发明人 |
GERHARD MICHAEL;PAUL HANS-JOCHEN |
分类号 |
G02B5/30;G02B1/11;G02B13/24;G02B17/08;G03F7/20;H01L21/027;(IPC1-7):G02B27/10 |
主分类号 |
G02B5/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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