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发明名称
摘要
申请公布号
KR100355212(B1)
申请公布日期
2002.12.26
申请号
KR19987008205
申请日期
1998.10.14
申请人
EKC TECHNOLOGY INC
发明人
分类号
B08B3/08;B24B37/04;C09D9/00;C11D3/30;C11D3/43;C11D7/06;C11D7/26;C11D7/32;C11D7/34;C11D7/50;C11D11/00;C23F3/06;C23G1/00;C23G1/10;C23G1/20;G03F7/42;H01L21/02;H01L21/304;H01L21/306;H01L21/308;H01L21/3105;H01L21/321;H01L21/3213
主分类号
B08B3/08
代理机构
代理人
主权项
地址
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