| 摘要 |
PROBLEM TO BE SOLVED: To improve vibration isolating performance by providing spring characteristics as soft as possible while retaining vertical and horizontal positioning accuracy in an isolator 2 having a vertical pneumatic spring S1 vertically supporting a mount board 3 (support counter-body) and a horizontal pneumatic spring S2 horizontally supporting it. SOLUTION: The vertical and horizontal pneumatic springs S1 and S2 in the isolator 2 are provided with either of a gimbal piston or a dome gimbal piston. This device may perform an active isolating control changing and controlling pneumatic pressures of the pneumatic springs S1 and S2 according to vibration states of a top plate 21 and positively applying controlled vibration counterbalancing the vibration relative to the top plate 21. |
