| 摘要 |
PROBLEM TO BE SOLVED: To solve the problems that natural cooling of temperature of a sample stage 106 approximately to a room temperature needed to be waited for to start the next analysis from approximately a room temperature in the conventional elimination gas analysis apparatus, natural cooling of the sample stage 106 took time, and time spent for analysis including the loading/unloading of a sample was large when performing analysis continuously using a plurality of samples, and thermal stress may be applied when rapid temperature change is given in the sample stage 106 made of quartz for leading to one of factors for spending much time for analysis. SOLUTION: In temperature increase elimination gas analysis, a temperature control mechanism is brought into contact with the sample stage 106 in a vacuum chamber 101 to allow samples to be exchanged quickly without applying thermal stress to the sample stage 106 and to reduce time to be spent for analysis.
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