发明名称 Method of depositing an electrically conductive oxide buffer layer on a textured substrate and articles formed therefrom
摘要 An article with an improved buffer layer architecture includes a substrate having a textured metal surface, and an electrically conductive lanthanum metal oxide epitaxial buffer layer on the surface of the substrate. The article can also include an epitaxial superconducting layer deposited on the epitaxial buffer layer. An epitaxial capping layer can be placed between the epitaxial buffer layer and the superconducting layer. A method for preparing an epitaxial article includes providing a substrate with a metal surface and depositing on the metal surface a lanthanum metal oxide epitaxial buffer layer. The method can further include depositing a superconducting layer on the epitaxial buffer layer, and depositing an epitaxial capping layer between the epitaxial buffer layer and the superconducting layer.
申请公布号 US2002198112(A1) 申请公布日期 2002.12.26
申请号 US20010888115 申请日期 2001.06.22
申请人 PARANTHAMAN M. PARANS;AYTUG TOLGA;CHRISTEN DAVID K. 发明人 PARANTHAMAN M. PARANS;AYTUG TOLGA;CHRISTEN DAVID K.
分类号 C23C14/02;C23C14/08;C30B23/02;H01L39/24;(IPC1-7):H01L39/12 主分类号 C23C14/02
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