发明名称 Wafer alignment device
摘要 The device (1) picks up and aligns a sawframe (30) for handling and aligning silicon wafers (31). The device (1) includes at least one resiliently moveable locating arm (11) which is adapted to engage co-operably with a notch (35, 36) on the periphery of the sawframe (30) when the device (1) is moved into contact therewith. The sawframe (30) is thus urged into alignment with the device (1), and may be held in position relative to the device (1).
申请公布号 US2002194745(A1) 申请公布日期 2002.12.26
申请号 US20020151735 申请日期 2002.05.20
申请人 WENTWORTH LABORATORIES LIMITED 发明人 FITZPATRICK JOHN JOSEPH;BYSOUTH JOHN
分类号 H01L21/68;(IPC1-7):G01D21/00 主分类号 H01L21/68
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