发明名称 Stacked gate flash with recessed floating gate
摘要 A nonvolatile memory comprises a substrate having trenches formed therein, a first dielectric layer is formed on said substrate. Protruding isolations are formed in said trenches and protruding over a surface of said substrate, thereby forming cavity between thereof. A first conductive layer is formed on said first dielectric layer and in said cavity. A second dielectric layer is formed on said second conductive layer and a second conductive layer is formed on said second dielectric layer as a control gate.
申请公布号 US2002195646(A1) 申请公布日期 2002.12.26
申请号 US20010891564 申请日期 2001.06.25
申请人 TSENG HORNG-HUEI 发明人 TSENG HORNG-HUEI
分类号 H01L21/28;H01L21/762;H01L21/8247;H01L27/115;(IPC1-7):H01L29/788;H01L21/823 主分类号 H01L21/28
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