| 摘要 |
An XY-axes table having a base, a plurality of linear guiding apparatuses, a stage, an X-axis drive linear motor and a Y-axis drive linear motor. The linear motor include an armature and a movable element relatively movable with respect to the armature. The linear motor further includes first magnetic pole teeth rows which are magnetically connected to a first magnetic pole of the armature and are arranged so as to be separated into a first stage and a second stage in a substantially vertical direction to a moving direction of the movable element. Second magnetic pole teeth rows which are magnetically connected to a second magnetic pole of the movable element are arranged so as to be separated into a first stage and a second stage in a substantially vertical direction to the moving direction of the movable element.
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