发明名称 |
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR |
摘要 |
PROBLEM TO BE SOLVED: To improve loading accuracy and to provide a semiconductor device using a finer semiconductor chip at a low cost. SOLUTION: The semiconductor chip 101 is made to face a substrate 104a in the state of being kept stuck to a dicing tape 501, pressed by collets 601 and 602 and joined. Thus, the need for inverting the chip is eliminated and the semiconductor device using the fine semiconductor chip is manufactured at a low cost. |
申请公布号 |
JP2002373917(A) |
申请公布日期 |
2002.12.26 |
申请号 |
JP20010181033 |
申请日期 |
2001.06.15 |
申请人 |
HITACHI LTD |
发明人 |
DAIROKU NORIYUKI;INOUE KOSUKE;HONMA HIROSHI |
分类号 |
H05K13/04;H01L21/60;H01L23/12 |
主分类号 |
H05K13/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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