| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring method, for the residual stress of a film, in which the residual stress of the film can be measured at low costs and easily and which can be applied to the film whose Young's modulus and Poisson ration are unknown and to the film which has an X-ray diffraction peak having two or more overlapped phases and to provide a test piece used for the measuring method. SOLUTION: When the residual stress exists in the film, the test piece is deformed according to its degree. Consequently, the ring-shaped test piece 1 comprising a joint is used, the change amount of a gap in the joint at a time when the outer circumference is coated with the film 2 is measured, the radius of curvature Ra of the test piece 1 after its coating is found, and the residual stress of the film can be measured easily on the basis of the radius of curvature of the test piece 1 before its coating and the radius of curvature Ra of the test piece 1 after its coating. The change amount of the gap in the joint before and after its coating may be the change amount before the film is stripped and after the film has been stripped when the film can be stripped in addition to the change amount before its coating and after its coating.
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