发明名称 System and method for controlling priority of lots employed in MES
摘要 The present invention relates to a method for controlling priority of lots employed in a MES, and more particularly, to a method for controlling priority of lots employed in a MES, wherein the priority of the lots provided by the MES can be automatically set up depending on a processing cycle time.
申请公布号 US2002198617(A1) 申请公布日期 2002.12.26
申请号 US20010983432 申请日期 2001.10.24
申请人 BAEK WONIN;PARK HEUNGCHUL;YUN JOODEOK;BAEK JONGHYUN;JUNG JOOSUCK 发明人 BAEK WONIN;PARK HEUNGCHUL;YUN JOODEOK;BAEK JONGHYUN;JUNG JOOSUCK
分类号 H01L21/00;G05B19/418;G06Q10/00;(IPC1-7):G06F19/00 主分类号 H01L21/00
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