| 摘要 |
PROBLEM TO BE SOLVED: To shorten a time required for purging with inert gas in a space (optical path space), such as a space between a projection optical system and a substrate, through which an exposure light passes. SOLUTION: Shielding members 115 are so arranged as to surround the side surfaces of an optical path space 113. Inert gas is supplied from a gas supply port 112 into the space 113 to purge the gas in the space 113 with the inert gas. The member 115 is provided with passages 116, for example, at portions where the flow of the inert gas delays. Thus, the passages 116 increase the flow velocity at these portions to shorten the purge time. |
